Precision-manufactured from high-purity natural crystal quartz and synthetic fused silica (JGS1, JGS2, JGS3 grades). Fully customizable by dimension, beveling, hole array drilling, and optical surface finish.
Procurement engineers in semiconductor fabs, photolithography optomechanics, and industrial process heating frequently face the critical choice between natural melted quartz (fused quartz) and synthetic precursor silica (fused silica).
Manufactured by high-temperature electric arc melting or oxyhydrogen fusion of naturally occurring high-purity crystalline quartz sand (≥99.99% SiO₂). Originating directly from the quartz rich reserves of Donghai County, China, natural fused quartz is characterized by exceptionally high thermal resistance (continuous service at 1,100°C, softening temperature exceeding 1,680°C), minimal coefficient of thermal expansion (5.5 × 10⁻⁷ /°C), and unmatched structural rigidity.
Natural quartz plate variants are the primary choice for furnace viewports, semiconductor wafer carrier diffusion fixtures, etching process windows, and high-temperature boiler sight glasses where thermal shock resilience and economic scalability are the driving procurement criteria.
Synthesized through chemical vapor deposition (CVD) or flame hydrolysis utilizing high-purity silicon tetrachloride (SiCl₄) gas. Synthetic fused silica eliminates almost all metallic impurities (Fe, Al, Ti, Na ≤ 0.1 ppm each) and achieves exceptional internal transmission in the deep ultraviolet (DUV) spectrum down to 185 nm.
Synthetic plates feature zero internal bubbles, zero inclusions, negligible birefringence (stress optical coefficient ≤ 3.5 nm/cm), and laser damage thresholds (LDT) exceeding 15 J/cm² at 1064 nm. These characteristics make them non-negotiable for excimer laser projection optics, high-energy UV curing systems, and optical flat calibration reference plates.
With precise hydroxyl (OH⁻) content regulation—ranging from low-OH (<5 ppm) for infrared applications to high-OH (>1,000 ppm) for radiation-resistant deep UV systems—our fabrication facilities optimize the transmission envelope to buyer-specified wavelengths.
| Property / Specification Parameter | JGS1 (Synthetic Fused Silica) | JGS2 (Optical Fused Quartz) | JGS3 (Infrared Fused Quartz) | Test Standard / Metrology Method |
|---|---|---|---|---|
| Primary Spectral Bandwidth | 185 nm – 2,500 nm (DUV / UV) | 220 nm – 2,500 nm (Standard Opt) | 260 nm – 3,500 nm (NIR / IR) | UV-Vis-NIR Spectrophotometer |
| SiO₂ Purity / Metallic Trace | ≥ 99.999% (<1 ppm metals) | ≥ 99.99% (≤20 ppm metals) | ≥ 99.99% (≤25 ppm metals) | ICP-MS Inductively Coupled Plasma |
| OH⁻ (Hydroxyl) Radical Content | High: 800 – 1,200 ppm | Medium: 150 – 300 ppm | Low: < 5 ppm (Water-Free) | FTIR Spectrometry Absorption |
| Thermal Expansion (0–300°C) | 5.5 × 10⁻⁷ /°C | 5.5 × 10⁻⁷ /°C | 5.4 × 10⁻⁷ /°C | Dilatometry (ASTM E228) |
| Continuous Service Temp | 1,050 °C | 1,100 °C | 1,150 °C | Thermal Stability Testing |
| Strain / Annealing Point | 1,070°C / 1,180°C | 1,120°C / 1,215°C | 1,140°C / 1,225°C | Beam Bending Viscosimetry |
| Refractive Index (nd @ 589.3nm) | 1.4585 | 1.4584 | 1.4586 | Abbe Refractometer Prism Metrology |
| Surface Quality Capability | 20/10 Scratch-Dig; λ/10 Wave | 40/20 Scratch-Dig; λ/4 Wave | 60/40 Scratch-Dig; Commercial Lapped | MIL-PRF-13830B / ISO 10110 |
Quartz plates require specialized non-contact ultrasonic abrasive processing, diamond grinding, and high-purity chemical polishing to prevent micro-cracks and residual thermal stresses.
Equipped with 9B and 16B multi-spindle planetary polishing machines using cerium oxide and diamond slurries. We routinely achieve optical surface flatness down to λ/10 (λ = 632.8 nm) per 100 mm diameter and parallelism ≤ 10 arcseconds, critical for laser windows, interferometry plates, and optical calibration standards.
Standard mechanical drilling causes micro-fracturing along hole edges that fails under cyclic furnace heating. Our 5-axis ultrasonic CNC milling centers generate round, square, stepped, and counter-bored hole arrays down to 0.3 mm diameter with edge chipping strictly controlled to < 0.05 mm, ideal for showerheads, carrier plates, and sensor ports.
Following CNC waterjet profiling and CNC grinding, every machined quartz plate undergoes a multi-stage thermal annealing cycle in computer-controlled electric resistance furnaces at 1,150°C. This process relieves 100% of internal mechanical machining stress, guaranteeing zero spontaneous cracking under severe operational conditions.
VEZLO Quartz operates a specialized 50-mu (≈33,000 m²) production base in Donghai County, Jiangsu Province—globally acknowledged as the premier raw silicon and natural quartz crystal processing cluster in Asia. Supported by RMB 10 million in fixed assets, we maintain end-to-end quality jurisdiction from raw high-purity quartz sand refinement (≤20 ppm trace metals) to CNC finished components.
Procurement leaders across North America, Europe, and the Asia-Pacific region are navigating supply-chain restructuring, stricter dimensional tolerances, and higher material purity standards.
To ensure flawless performance under vacuum, high mechanical pressure, and optical projection, our inspection laboratory validates every production batch against internationally accepted metrological standards.
Natural quartz plate manufacturing involves high-temperature fusion where microscopic gas pockets or refractory trace particles can become trapped. Under DIN ISO 10110-3, we inspect and categorize every plate into strict tolerance classes:
Every shipment is accompanied by a formal factory inspection certificate verifying optical transmission, bubble-inclusion density, and dimensional CMM results.
Surface quality is controlled under MIL-PRF-13830B guidelines using designated optical bright-field shadowgraph stations. We deliver:
Transmission profiles are verified using Shimadzu UV-3600 Plus spectrophotometers across 190 nm to 3,200 nm, guaranteeing internal transmittance τ ≥ 90% at specified working bands.
Direct answers to the most common technical, logistical, and commercial inquiries submitted by procurement teams, mechanical design engineers, and laboratory purchasing managers.
Submit your CAD drawings or technical specifications today. Our engineering desk in Donghai reviews design feasibility, selects optimal material grades, and returns comprehensive quotation packages within 2 hours.